Concepedia

Synthesis of thin coatings by plasma-assisted chemical vapour deposition using metallo-organic compounds as precursors

K.‐T. Rie, J. Wöhle, A. Gebauer

Surface and Coatings Technology · 1993 · 27 citations · 3 references

DOI

Concepts

References

3

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

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Effect of N2-to-TiCl4 flow rate ratio on the properties of TiN coatings formed by d.c. discharge plasma-assisted chemical vapor deposition

Kazuyuki Oguri, Hikari Fujita, Tohru Arai · Thin Solid Films · 1991 · 22 citations

, , +14

Spectroscopic investigation of N2H2ArTiCl4-assisted chemical vapour deposition discharge for plasma of TiN

K.‐T. Rie, J. Wöhle · Materials Science and Engineering A · 1991 · 14 citations

, , +14