Materials Science and Engineering A · 1991 · 14 citations · 4 references
Natural SciencesChemistryMaterials SciencePhysical ChemistryPlasma PhysicsSpectroscopyChemical Vapor DepositionHigh-temperature PlasmasPlasma FundamentalsPlasma SourcesPlasma Surface TreatmentPlasma-surface InteractionsPlasma ChemistryPlasma DepositionPlasma ProcessesPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor Deposition
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