Concepedia

Publication | Closed Access

Ion cluster beam deposition of thin films

DOI

67

Citations

12

References

1991

Year

W. L. Brown, Martin F. Jarrold, R. L. McEachern, M. Sosnowski, Gikan H. Takaoka, Hideyuki Usui, Isao Yamada
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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