Concepedia

Ion cluster beam deposition of thin films

W. L. Brown, Martin F. Jarrold, R. L. McEachern, M. Sosnowski, Gikan H. Takaoka, Hideyuki Usui, Isao Yamada

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 67 citations · 12 references

DOI

Concepts

References

12

Ionized-cluster beam deposition

Toshiyuki Takagi, Ichiro Yamada, Akio Sasaki · Journal of Vacuum Science and Technology · 1975 · 112 citations

, , +8

Metallization by ionized cluster beam deposition

Ichiro Yamada, Toshiyuki Takagi · IEEE Transactions on Electron Devices · 1987 · 73 citations

, , +17

Formation of large metal clusters by surface nucleation

W. Knauer · Journal of Applied Physics · 1987 · 70 citations

, , +12

Formation mechanism of large clusters from vaporized solid material

Isao Yamada, Hiroaki. Usui, Toshinori Takagi · The Journal of Physical Chemistry · 1987 · 59 citations

, , +7

Epitaxial growth of Al(111)/Si(111) films using partially ionized beam deposition

C. H. Choi, Robert A. Harper, A. S. Yapsir et al. · Applied Physics Letters · 1987 · 48 citations

, , +17