TiN coating to three-dimensional materials by PBII using vacuum titanium arc plasma

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources

André Anders, S. Anders, I.G. Brown et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 157 citations

Natural Sciences, Materials Science, Physics +17

Repetitively pulsed metal ion beams for ion implantation

R. J. Adler, S. T. Picraux · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 102 citations

Natural Sciences, Physics, Plasma Physics +4

Development of a plasma immersion ion implanter for the surface treatment of metal components

George Collins, R. Hutchings, K. T. Short et al. · Surface and Coatings Technology · 1996 · 76 citations

Natural Sciences, Physics, Plasma Physics +14

Low-temperature deposition of titanium nitride

A.J. Perry, James R. Treglio, Albert F. Tian · Surface and Coatings Technology · 1995 · 28 citations

Natural Sciences, Materials Engineering, Materials Science +10