TwinMag II: Improving an advanced sputtering tool

Reactive alternating current magnetron sputtering of dielectric layers

Michael Scherer, J.J. Schmitt, R. Latz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 62 citations

Natural Sciences, Materials Engineering, Materials Science +16

A highest rate self-sputtering magnetron source

R. Kukla, T. Krug, Ryan Ludwig et al. · Vacuum · 1990 · 54 citations

Natural Sciences, Materials Science, Physics +5

Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering

J. Szczyrbowski, M. Ruske, G. Teschner et al. · Journal of Non-Crystalline Solids · 1997 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +12

Large-scale antireflective coatings on glass produced by reactive magnetron sputtering

S. Beiβwenger, W. Dicken, J. Szczyrbowski · Surface and Coatings Technology · 1993 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +14