A dual axis CMOS micromachined convective thermal accelerometer

Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon

Koushik Biswas, S. Kal · Microelectronics Journal · 2005 · 160 citations

Engineering, Materials Engineering, Materials Science +17

Micromachined inclinometer with high sensitivity and very good stability

S. Billat, H. Glosch, M Kunze et al. · Sensors and Actuators A Physical · 2002 · 102 citations

Engineering, Mechanical Engineering, Instrumentation +13

Natural convection between concentric spheres at low Rayleigh numbers

Lawrence R. Mack, H.C. Hardee · International Journal of Heat and Mass Transfer · 1968 · 100 citations

Engineering, Mechanical Engineering, Heat Transfer +6

Micromachined accelerometer with no proof mass

Albert M. Leung, John D. Jones, E. Czyzewska et al. · 2002 · 88 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

An optimized micromachined convective accelerometer with no proof mass

Xiaowei Luo, Yuqiang Yang, Fen Zheng et al. · Journal of Micromechanics and Microengineering · 2001 · 66 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17