Aluminum incorporation control in AlGaN MOVPE: experimental and modeling study

A reaction-transport model for AlGaN MOVPE growth

T. G. Mihopoulos, Vijay K. Gupta, Klavs F. Jensen · Journal of Crystal Growth · 1998 · 181 citations

Natural Sciences, Materials Engineering, Materials Science +12

Modeling of InGaN MOVPE in AIX 200 Reactor and AIX 2000 HT Planetary Reactor

E.V. Yakovlev, S. Yu. Karpov, Yu.N. Makarov et al. · MRS Internet Journal of Nitride Semiconductor Research · 1999 · 58 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Numerical study of SiC CVD in a vertical cold-wall reactor

A. N. Vorob'ev, S. Yu. Karpov, A.E. Komissarov et al. · Computational Materials Science · 2002 · 36 citations

Engineering, Chemical Engineering, Mechanical Engineering +13