Surface and Coatings Technology · 1994 · 18 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface ScienceThin FilmsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsSputter DepositionSputteringSputtering ProcessesThin Oxide FilmsThin Oxide Layers
8
The theory of ion beam polishing and machining
G Carter, M. J. Nobes, IV Katardjiev · Vacuum · 1993 · 30 citations
Engineering, Manufacturing Engineering, Materials Science +7