The theory of ion beam polishing and machining

Linear and Nonlinear Waves

K. J. Whiteman · Physics Bulletin · 1975 · 7.1K citations

Natural Sciences, Mathematics, Physics +12

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 792 citations

Natural Sciences, Physics, Atomic Physics +13

Sputtering—a review of some recent experimental and theoretical aspects

H. Oechsner · Applied Physics A · 1975 · 298 citations

Natural Sciences, Materials Engineering, Materials Science +10

Submicron-scale surface roughening induced by ion bombardment

Elliott A. Eklund, Robijn Bruinsma, Joseph Rudnick et al. · Physical Review Letters · 1991 · 263 citations

Natural Sciences, Materials Engineering, Materials Science +17