Effect of hydrogen on deposition of tantalum nitride thin films from ethylimidotantalum complex

Surface organometallic chemistry in the chemical vapor deposition of aluminum films using triisobutylaluminum: .beta.-hydride and .beta.-alkyl elimination reactions of surface alkyl intermediates

Brian E. Bent, Ralph G. Nuzzo, Lawrence H. Dubois · Journal of the American Chemical Society · 1989 · 179 citations

Natural Sciences, Chemistry, Materials Science +14

<i>An Introduction to Chemisorption and Catalysis by Metals</i>

R.P.H. Gasser, Gert Ehrlich · Physics Today · 1987 · 151 citations

Natural Sciences, Chemistry, Materials Science +17

Decomposition of trimethylaluminum on silicon(100)

T. R. Gow, Rui‐Biao Lin, Linda A. Cadwell et al. · Chemistry of Materials · 1989 · 53 citations

Natural Sciences, Chemistry, Materials Science +8

Deposition of tantalum nitride thin films from ethylimidotantalum complex

Wen Ping Chang · Journal of Materials Science Letters · 1992 · 43 citations

Natural Sciences, Materials Engineering, Materials Science +11

Fiber Coatings Derived from Molecular Precursors

H. Fischer, David Larkin, Leonard V. Interrante · MRS Bulletin · 1991 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +14