Electronics Letters · 2004 · 22 citations · 7 references
EngineeringElectrical EngineeringMaterials ScienceOpticsOptoelectronicsPhotonicsEtching ProcessesIntegrated OpticsOptical Thin FilmsOptical WaveguidesPhotonic Integrated CircuitsWaveguidesDevice FabricationEtchingIntegrated Optical WaveguidesIntegrated WaveguidesPlanar Optical WaveguidesWaveguide FabricationWaveguide Loss
The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 µm. For the 0.5 µm width, the propagation losses at λ=1.55 µm as low as 4.2 dB/mm have been measured.
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Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors
S. Lardenois, Laurent Vivien, Éric Cassan et al. · Optics Letters · 2003 · 126 citations