Concepedia

Development of internal-antenna-driven large-volume RF plasma sources for plasma-based ion implantation

Yuichi Setsuhara, Shoji Miyake, Yoichi Sakawa, Tatsuo Shoji

Surface and Coatings Technology · 2001 · 16 citations · 8 references

DOI

Concepts

References

8

Review of inductively coupled plasmas for plasma processing

Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 678 citations

, , +17

Plasma ionization by helicon waves

F F Chen · Plasma Physics and Controlled Fusion · 1991 · 584 citations

, , +13

Very efficient plasma generation by whistler waves near the lower hybrid frequency

R. W. Boswell · Plasma Physics and Controlled Fusion · 1984 · 511 citations

, , +14

Electron cyclotron resonance microwave discharges for etching and thin-film deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 361 citations

, , +17

Experimental investigations of the propagation of surface waves along a plasma column

Michel Moisan, A. Shivarova, A. W. Trivelpiece · Plasma Physics · 1982 · 272 citations

, , +16