Energy Procedia · 2014 · 31 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySemiconductor MaterialsSurface ScienceAtomic Layer DepositionSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor SurfacesSurface PassivationSurface PhysicsAnnealingAtomic Layer Deposition PassivationCarrier LifetimePassivationPassivation Of SemiconductorsPassivation TechniquesSecondary Ion Mass SpectrometrySilicon Passivation
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Jan Schmidt, Boris Veith, Rolf Brendel · physica status solidi (RRL) - Rapid Research Letters · 2009 · 188 citations