Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators

Nanotube Nanotweezers

Philip Kim, Charles M. Lieber · Science · 1999 · 1.1K citations

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M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures

P.M. Osterberg, S.D. Senturia · Journal of Microelectromechanical Systems · 1997 · 764 citations

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Stiction, adhesion energy, and the Casimir effect in micromechanical systems

Eyal Buks, M. L. Roukes · Physical review. B, Condensed matter · 2001 · 440 citations · Full text

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Calculation of pull-in voltages for carbon-nanotube-based nanoelectromechanical switches

Marc Dequesnes, Slava V. Rotkin, N. R. Aluru · Nanotechnology · 2002 · 439 citations

Natural Sciences, Materials Science, Physics +17

Dynamic micromechanics on silicon: Techniques and devices

K. Petersen · IEEE Transactions on Electron Devices · 1978 · 391 citations

Engineering, Materials Engineering, Materials Science +16