Publication | Closed Access
Anomalous Transient Tail Diffusion of Boron in Silicon: Kinetic Modeling of Diffusion and Cluster Formation
10
Citations
8
References
1989
Year
Kinetic ModelingBoron NitrideEngineeringPhysicsApplied PhysicsCluster FormationCondensed Matter PhysicsSemiconductor Device FabricationAnomalous DiffusionSilicon On Insulator
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