Concepedia

Crystallization behaviour of amorphous SiC films prepared by r.f. sputtering

Shozo Inoue, Kumayasu Yoshii, M. Umeno, Hideaki Kawabe

Thin Solid Films · 1987 · 42 citations · 15 references

DOI

Concepts

References

15

Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering

M. H. Brodsky, M. Cardona, J. J. Cuomo · Physical review. B, Solid state · 1977 · 1.6K citations

, , +17

Properties and structure of <i>a</i>-SiC:H for high-efficiency <i>a</i>-Si solar cell

Y. Tawada, K. Tsuge, M. Kondō et al. · Journal of Applied Physics · 1982 · 490 citations

, , +17

Electrical and optical properties of amorphous silicon carbide, silicon nitride and germanium carbide prepared by the glow discharge technique

David Anderson, W. E. Spear · Philosophical magazine · 1977 · 456 citations

, , +17

Self-diffusion of silicon-30 in ?-SiC single crystals

J. D. Hong, R. F. Davis, Dale E. Newbury · Journal of Materials Science · 1981 · 142 citations

, , +12

Self‐Diffusion of Carbon‐14 in High‐Purity and N‐Doped α‐SiC Single Crystals

J. D. Hong, R. F. Davis · Journal of the American Ceramic Society · 1980 · 129 citations

, , +16