Characterization of undoped and Cu-doped ZnO films for surface acoustic wave applications

Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering

Ki Hyun Yoon, Jiwon Choi, Dong-Heon Lee · Thin Solid Films · 1997 · 99 citations

Materials Science, Aluminium Nitride, Engineering +8

Growth of ZnO thin films on interdigital transducer/Corning 7059 glass substrates by two-step fabrication methods for surface acoustic wave applications

Mu-Shiang Wu, Wen‐Ching Shih, Woo‐Hu Tsai · Journal of Physics D Applied Physics · 1998 · 53 citations

Engineering, Mechanical Engineering, Thin Film Process Technology +17

Quasi-Microwave Band Longitudinally Coupled Surface Acoustic Wave Resonator Filters Using ZnO/Sapphire Substrate

Jun Koike, Hiroshi Tanaka, Hideharu Ieki · Japanese Journal of Applied Physics · 1995 · 44 citations

Surface Acoustic Wave, Engineering, Acoustic Metamaterial +6

Piezoelectric properties of zinc oxide films on glass substrates deposited by RF-magnetron-mode electron cyclotron resonance sputtering system

Michio Kadota, Makoto Minakata · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 1995 · 31 citations

Materials Science, Electrical Engineering, Engineering +11

Influence of Copper Dopants on the Resistivity of ZnOFilms

Andreas Hartmann, M. K. Puchert, Robert N. Lamb · Surface and Interface Analysis · 1996 · 30 citations

Engineering, Optoelectronic Devices, Thin Film Process Technology +16