Applied Physics A · 1994 · 15 citations · 18 references
EngineeringPhysicsPositron Annihilation SpectroscopyApplied PhysicsCondensed Matter PhysicsDefect FormationMbe-grown Silicon StructuresSemiconductor Device FabricationSilicon On InsulatorDefect Tolerance
18
Growth and characterization of a delta-function doping layer in Si
H.P. Zeindl, T. Wegehaupt, I. Eisele et al. · Applied Physics Letters · 1987 · 142 citations
Semiconductors, Electrical Engineering, Quantum Confinement +15