Surface and Coatings Technology · 1999 · 38 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceThin FilmsCoating ProcessesCoatingsPlasma Surface TreatmentPlasma-surface InteractionsSurface CoatingsThin-film DepositionNitride Thin FilmsNitridingPlasma DepositionPlasma NitridingPlasma-assisted CoatingPlasma-enhanced DepositionSilicon Nitride
13
Kazuyuki Oguri, Tohru Arai · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 116 citations
Arup Gangopadhyay, P. A. Willermet, M. A. Tamor et al. · Tribology International · 1997 · 108 citations
Natural Sciences, Materials Engineering, Materials Science +14