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Rapid micromachining of high aspect ratio holes in fused silica glass by high repetition rate picosecond laser

Materials SciencePhotonicsFused Silica GlassAdvanced Laser ProcessingEngineeringRapid MicromachiningLaser Micro-processingMicrofabricationApplied PhysicsLaser Processing TechnologyLaser-assisted DepositionMicromachiningMicro-optical Component