Microelectronics Reliability · 2010 · 31 citations · 9 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsSemiconductor DevicesIntegrated Circuit FabricationStrain EngineeringSubstrate PreparationThin-film DepositionThin-film MaterialsWafer BondingSilicon Wafers
9
John C. Coburn, Michael T. Pottiger, Susan C. Noe et al. · Journal of Polymer Science Part B Polymer Physics · 1994 · 62 citations
Natural Sciences, Materials Engineering, Materials Science +17