Concepedia

The crossover of preferred orientation in TiN film growth: A real time x-ray scattering study

Jung Ho Je, Do Young Noh, H. K. Kim, K. S. Liang

Journal of materials research/Pratt's guide to venture capital sources · 1997 · 16 citations · 9 references

DOI

Concepts

References

9

Structure and properties of TiN coatings

J.‐E. Sundgren · Thin Solid Films · 1985 · 905 citations

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Angle calculations for 3- and 4-circle X-ray and neutron diffractometers

W. R. Busing, H. A. Levy · Acta Crystallographica · 1967 · 452 citations · Full text

, , +8

Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 407 citations · Full text

, , +15

X-ray diffraction studies of physically vapour-deposited coatings

D.S. Rickerby, A.M. Jones, B. Bellamy · Surface and Coatings Technology · 1989 · 168 citations

, , +14

Reactive high rate D.C. sputtering: Deposition rate, stoichiometry and features of TiOx and TiNx films with respect to the target mode

S. Schiller, G. Beister, William K. Sieber · Thin Solid Films · 1984 · 145 citations

, , +17