CIRP Annals · 2011 · 67 citations · 8 references
EngineeringChemical EngineeringChemistryElectrochemical EngineeringElectrochemistryMicrofabricationElectrochemical CellsElectrode KineticsElectrode MaterialsElectrolytic CellsMicrofluidicsMicromachiningElectrochemical MicromachiningElectrochemical Surface EngineeringMicroelectromechanical System Fabrication
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