Sensors and Actuators · 1989 · 28 citations · 2 references
EngineeringMechanical EngineeringMechatronics EngineeringInstrumentationMechanical DesignSensorsIndustrial InstrumentationMechanical MeasurementMechanical SensorsMechanical System DesignSensor FundamentalsTactile SensingCad FabricationMechanical Measurement SystemsMechanical Sensing
2
Silicon as a mechanical material
K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations