Publication | Closed Access
A numerical study of factors affecting the characterization of nanoindentation on silicon
77
Citations
9
References
2006
Year
Materials ScienceNumerical StudyEngineeringMicrofabricationNanotechnologySurface ScienceApplied PhysicsSemiconductor Device FabricationNanometrologySilicon On InsulatorNanomechanicsNanolithography Method
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