Electrostatic force coupling of MEMS oscillators for spectral vibration measurements

A Study of Fluid Squeeze-Film Damping

W. S. Griffin, Hilary Richardson, Shoichi Yamanami · Journal of Basic Engineering · 1966 · 175 citations

Engineering, Mechanical Engineering, Physics +14

Extending the validity of squeezed-film damper models with elongations of surface dimensions

Timo Veijola, Antti Pursula, Peter Råback · Journal of Micromechanics and Microengineering · 2005 · 80 citations

Engineering, Materials Science, Aerodynamics +12

A triangular electrostatic comb array for micromechanical resonant frequency tuning

Ki Bang Lee, Young-Ho Cho · Sensors and Actuators A Physical · 1998 · 67 citations

Engineering, Electrical Engineering, Materials Science +14

Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators

Karla Hiller, Matthias Kuechler, Detlef Billep et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 47 citations

Engineering, Materials Engineering, Materials Science +17

A spectral vibration detection system based on tunable micromechanical resonators

Dirk Scheibner, Jan Mehner, Danny Reuter et al. · Sensors and Actuators A Physical · 2005 · 37 citations

Engineering, Mechanical Engineering, Physics +14