Concepedia
Statistics
Publications
5
Citations
144
H-Index
Active since
2003
Affiliations
Chemnitz University of Technology(Current)
Siemens (Germany)
Fraunhofer-Gesellschaft
Fraunhofer Institute for Reliability and Microintegration
Dirk Scheibner is an author at Chemnitz University of Technology specializing in engineering, microelectromechanical systems, and vibration.
Publications per year
2003–2011
Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators
Karla Hiller, Matthias Kuechler, Detlef Billep et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 47 citations
Engineering, Materials Engineering, Materials Science +17
A spectral vibration detection system based on tunable micromechanical resonators
Dirk Scheibner, Jan Mehner, Danny Reuter et al. · Sensors and Actuators A Physical · 2005 · 37 citations
Engineering, Mechanical Engineering, Physics +14
Characterization and self-test of electrostatically tunable resonators for frequency selective vibration measurements
Dirk Scheibner, Jan Mehner, Danny Reuter et al. · Sensors and Actuators A Physical · 2003 · 31 citations
Engineering, Materials Science, Physics +14
New approach of frequency tuning for kinetic energy harvesters
Joerg Schaufuss, Dirk Scheibner, Jan Mehner · Sensors and Actuators A Physical · 2011 · 17 citations
Engineering, Bioengineering, Mechanical Engineering +13
Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
Roman Forke, Dirk Scheibner, Jan Mehner et al. · Sensors and Actuators A Physical · 2007 · 12 citations
Engineering, Electrical Engineering, Physics +16
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