Selective epitaxial growth of silicon in pancake reactors

Chemical Vapor Deposition: A Chemical Engineering Perspective

Dennis W. Hess, Klavs F. Jensen, Timothy J. Anderson · Reviews in Chemical Engineering · 1985 · 90 citations

Natural Sciences, Chemical Engineering, Chemistry +12

Growth and etching of silicon in chemical vapour deposition systems; The influence of thermal diffusion and temperature gradient

P. van der Putte, L.J. Giling, J. Bloem · Journal of Crystal Growth · 1975 · 70 citations

Engineering, Materials Engineering, Materials Science +16

Selective Silicon Epitaxy Using Reduced Pressure Technique

Kohetsu Tanno, Nobuhiro Endo, Hiroshi Kitajima et al. · Japanese Journal of Applied Physics · 1982 · 66 citations

Engineering, Materials Engineering, Materials Science +16

Thermal Diffusion Effects in Chemical Vapor Deposition Reactors

Joel P. Jenkinson, Richard Pollard · Journal of The Electrochemical Society · 1984 · 64 citations

Engineering, Chemical Engineering, Chemistry +17

Local Loading Effect in Selective Silicon Epitaxy

Akihiko Ishitani, Nobuhiro Endo, Hideki Tsuya · Japanese Journal of Applied Physics · 1984 · 46 citations

Engineering, Materials Science, Electronic Materials +11