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Polarization-enhanced Mg doping of AlGaN/GaN superlattices
162
Citations
11
References
1999
Year
Materials ScienceAluminium NitrideElectrical EngineeringWide-bandgap SemiconductorPolarization-enhanced Mg DopingEngineeringNanoelectronicsApplied PhysicsSpontaneous PolarizationAluminum Gallium NitrideGan Power DeviceBulk Gan FilmMg-doped Algan/gan SuperlatticesCategoryiii-v Semiconductor
The hole-transport properties of Mg-doped AlGaN/GaN superlattices are carefully examined. Variable-temperature Hall-effect measurements indicate that the use of such superlattices enhances the average hole concentration at a temperature of 120 K by over five orders of magnitude compared to a bulk GaN film (the enhancement at room temperature is a factor of 9). An unusual modulation-doping scheme, which has been realized using molecular-beam epitaxy, has yielded high-hole-mobility superlattices and conclusively demonstrated the pivotal role of piezoelectric and spontaneous polarization in determining the band structure of the superlattices.
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