Vacuum properties of TiZrV non-evaporable getter films

Gas Incorporation into Sputtered Films

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Materials Science, Materials Engineering, Chemical Engineering +14

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Obtention of pressures in the 10−14 torr range by means of a ZrVFe non evaporable getter

C. Benvenuti, Paolo Chiggiato · Vacuum · 1993 · 46 citations · Full text