Vapor levitation epitaxy: system design and performance

The Preparation and Properties of Vapor-Deposited Epitaxial GaAs[sub 1−x]P[sub x] Using Arsine and Phosphine

J. J. Tietjen, J. A. Amick · Journal of The Electrochemical Society · 1966 · 276 citations

Natural Sciences, Materials Science, Physics +17

Vapor growth of epitaxial GaAs: A summary of parameters which influence the purity and morphology of epitaxial layers

J.V. DiLorenzo · Journal of Crystal Growth · 1972 · 135 citations

Engineering, Electrical Engineering, Materials Science +16

CVD in Stagnation Point Flow: An Evaluation of the Classical 1D Treatment

Carl J. Houtman, David B. Graves, Klavs F. Jensen · Journal of The Electrochemical Society · 1986 · 132 citations

Engineering, Chemical Engineering, Materials Engineering +16

A feedback method for investigating carrier distributions in semiconductors

G. L. Miller · IEEE Transactions on Electron Devices · 1972 · 123 citations

Engineering, Electrical Engineering, Microelectronics +16

Hydrodynamic description of CVD processes

G. Wahl · Thin Solid Films · 1977 · 123 citations

Natural Sciences, Chemical Engineering, Physics +12