Novel technologies for the realisation of GaAs pHEMTs with 120 nm self-aligned and nanoimprinted T-gates - Concepedia

Concepedia

Publication | Closed Access

Novel technologies for the realisation of GaAs pHEMTs with 120 nm self-aligned and nanoimprinted T-gates

14

Citations

4

References

2003

Year

David A. J. Moran, E. Boyd, H. McLelland, K. Elgaid, D.S. Macintyre, S. Thoms, C.R. Stanley, Iain Thayne

Microelectronic Engineering

Electrical EngineeringEngineeringRf SemiconductorPhysicsNovel TechnologiesNanoelectronicsNanoimprinted T-gatesApplied PhysicsMicroelectronicsGaas PhemtsOptoelectronicsCompound SemiconductorSemiconductor Device

References

	Year	Citations

Page 1

Page 1