Fabrication of enclosed nanofluidic channels by UV cured imprinting and optimized thermal bonding of SU-8 photoresist

Xudi Wang, Liangjin Ge, Jingjing Lu, Xiaojun Li, Keqiang Qiu, Yangchao Tian, Shaojun Fu, Zheng Cui

Microelectronic Engineering · 2009 · 26 citations · 10 references

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