Materials Science in Semiconductor Processing · 2014 · 24 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials PhysicsThin FilmsElectrical Properties Of CeramicsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsElectrical ResistivityElectrical Resistivity AnalysisNitride Thin FilmsNitrides Thin Films
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Reactive-sputter-deposited TiN films on glass substrates
Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations
Natural Sciences, Materials Engineering, Materials Science +14