Publication | Closed Access
Short pulse laser microforming of thin metal sheets for MEMS manufacturing
58
Citations
6
References
2007
Year
Materials ScienceThin Metal SheetsAdvanced Laser ProcessingEngineeringLaser Micro-processingMicrofabricationFabrication TechniqueMems ManufacturingShort PulseLaser Processing TechnologyLaser-assisted DepositionMicromachiningMicro-electromechanical System3D PrintingMicrostructure
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