Thin Solid Films · 1997 · 33 citations · 22 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsPhysical ChemistryPlasma PhysicsChemical Vapor DepositionMicrowave-assisted SynthesisChemical Vapor Deposition NucleationChemical Vapor Deposition PrecursorsMicrowave Plasma SourcesPlasma-assisted Chemical Vapor DepositionPlasma-assisted SynthesisPlasma-enhanced Chemical Vapor Deposition
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Surface reactions of silicon with aluminum and with indium
J. J. Lander, John H. Morrison · Surface Science · 1964 · 299 citations