Electron-beam-induced deposition of carbon films on Si(1 0 0) using chemisorbed ethylene as a precursor molecule - Concepedia

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Electron-beam-induced deposition of carbon films on Si(1 0 0) using chemisorbed ethylene as a precursor molecule

38

Citations

21

References

2004

Year

Olivier Guise, Hubertus Marbach, Jeremy Levy, Joachim Ahner, John T. Yates

Surface Science

EngineeringNanotechnologySurface ScienceApplied PhysicsSilicenePrecursor MoleculeChemistryChemical DepositionElectron-beam-induced DepositionChemical Vapor DepositionThin Film ProcessingChemisorbed Ethylene

References

	Year	Citations

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