Electron microscopic characterization of reactively sputtered ZnO films with different Al-doping levels - Concepedia

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Electron microscopic characterization of reactively sputtered ZnO films with different Al-doping levels

104

Citations

23

References

1998

Year

I. Sieber, N. Wanderka, I. Urban, I. Dörfel, E. Schierhorn, F. Fenske, W. Fuhs

Thin Solid Films

Materials ScienceAluminium NitrideElectron Microscopic CharacterizationEngineeringOxide ElectronicsSurface ScienceApplied PhysicsGallium OxideThin FilmsDifferent Al-doping LevelsZno FilmsThin Film Processing

References

	Year	Citations

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