Concepedia

Spectroscopic ellipsometry characterization of thin-film silicon nitride

G. E. Jellison, F. A. Modine, P. Doshi, A. Rohatgi

Thin Solid Films · 1998 · 106 citations · 11 references

DOI

Concepts

References

11

Optical Properties of Solids

F. Wooten, Sumner P. Davis · American Journal of Physics · 1973 · 4.6K citations

, , +12

Parameterization of the optical functions of amorphous materials in the interband region

G. E. Jellison, F. A. Modine · Applied Physics Letters · 1996 · 2.3K citations

, , +17

Optical dispersion relations for amorphous semiconductors and amorphous dielectrics

A. Rahim Forouhi, Iris Bloomer · Physical review. B, Condensed matter · 1986 · 754 citations

, , +17

Data analysis for spectroscopic ellipsometry

G. E. Jellison · Thin Solid Films · 1993 · 337 citations

, , +11

Optical functions of silicon determined by two-channel polarization modulation ellipsometry

G. E. Jellison · Optical Materials · 1992 · 336 citations

, , +14