Concepedia

Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution

Ju Yi Lee, Hui-Yi Chen, Cheng-Chih Hsu, Chyan-Chyi Wu

Sensors and Actuators A Physical · 2007 · 89 citations · 17 references

DOI

Concepts

References

17

The Refractive Index of Air

Bengt Edlén · Metrologia · 1966 · 1.2K citations

, , +9

High-resolution, high-speed, low data age uncertainty, heterodyne displacement measuring interferometer electronics

Frank C. Demarest · Measurement Science and Technology · 1998 · 175 citations

, , +15

Technology and applications of grating interferometers in high-precision measurement

Arnold Teimel · Precision Engineering · 1992 · 128 citations

, , +11

Simple two-frequency laser

Der-Chin Su, M. S. Chiu, Cheng-Der Chen · Precision Engineering · 1996 · 116 citations

Optical Frequency Shifting by Means of a Rotating Diffraction Grating

W. H. Stevenson · Applied Optics · 1970 · 116 citations

, , +5