Journal of Crystal Growth · 1984 · 37 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsChemical Vapor DepositionIntegrated Circuit FabricationSemiconductor Device MaterialsSemiconductor SurfacesSemiconductor Thin FilmsThin-film DepositionChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsDevice FabricationMetal-organic Chemical Vapor DepositionMetalorganic Chemical Vapor Deposition
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Selective MOCVD epitaxy for optoelectronic devices
R. Azoulay, N. Bouadma, J.C. Bouley et al. · Journal of Crystal Growth · 1981 · 60 citations
Kenji Gamo, T. Inada, S. Krekeler et al. · Solid-State Electronics · 1977 · 53 citations