Ion-beam assisted etching of semiconductors

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

Natural Sciences, Physics, Atomic Physics +13

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

Natural Sciences, Materials Science, Physics +15

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

W. D. Wilson, L.G. Haggmark, J.P. Biersack · Physical review. B, Solid state · 1977 · 810 citations

Natural Sciences, Physics, Nuclear Physics +14

Plasma etching—A discussion of mechanisms

J. W. Coburn, Harold F. Winters · Journal of Vacuum Science and Technology · 1979 · 601 citations

Natural Sciences, Chemistry, Materials Science +15

Laser-induced gas-surface interactions

T. J. Chuang · Surface Science Reports · 1983 · 415 citations