High-temperature growth of thick AlN layers on sapphire (0 0 0 1) substrates by solid source halide vapor-phase epitaxy

Ken-ichi Eriguchi, Takako Hiratsuka, Hisashi Murakami, Yoshinao Kumagai, Akinori Koukitu

Journal of Crystal Growth · 2008 · 31 citations · 22 references

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