Two original pieces of apparatus for the preparation of coatings using dynamic ion beam mixing: First applications

Technology and applications of broad-beam ion sources used in sputtering. Part I. Ion source technology

H. R. Kaufman, J. J. Cuomo, J. M. E. Harper · Journal of Vacuum Science and Technology · 1982 · 251 citations

Electrical Engineering, Compact Ion Source, Engineering +13

A medium energy facility for variable temperature implantation and analysis

J. Chaumont, F. Lalu, M. Salomé et al. · Nuclear Instruments and Methods in Physics Research · 1981 · 112 citations

Energy Harvesting, Engineering, Energy Efficiency +10

Adherent TiN films produced by ion beam enhanced deposition at room temperature

R. A. Kant, B.D. Sartwell, I. L. Singer et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 76 citations

Materials Science, Room Temperature, Ion Implantation +11

Surface treatment of aluminum alloy at room temperature with titanium-nitride films by dynamic mixing

Takashi Sato, K. Ohata, Naotatsu Asahi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 27 citations

Materials Engineering, Materials Science, Engineering +11

Thick and homogeneous surface layers obtained by reactive ion-beam-enhanced deposition

L. Guzmàn, Flavio Giacomozzi, B. Margesin et al. · Materials Science and Engineering · 1987 · 27 citations

Materials Science, Ion Implantation, Engineering +7