Publication | Closed Access
Adherent TiN films produced by ion beam enhanced deposition at room temperature
76
Citations
5
References
1985
Year
Materials ScienceRoom TemperatureIon ImplantationEngineeringThin-film FabricationSurface ScienceApplied PhysicsAdherent Tin FilmsIon BeamThin Film Process TechnologyThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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