Concepedia

Gettering of metals by He induced voids in silicon

V. Raineri, A. Battaglia, E. Rimini

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 71 citations · 2 references

DOI

Concepts

References

2

Helium desorption/permeation from bubbles in silicon: A novel method of void production

C.C. Griffioen, John H. Evans, P.C. de Jong · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 246 citations

, , +13

Infrared spectroscopy of chemically bonded hydrogen at voids and defects in silicon

H. J. Stein, S. M. Myers, D.M. Follstaedt · Journal of Applied Physics · 1993 · 56 citations

, , +17