Applied Surface Science · 2005 · 16 citations · 8 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationNanomaterialsNanotechnologyNanomaterial CharacterizationNanoporous MaterialsNanoscale MaterialsRaman SpectroscopySemiconductor Device MaterialsSilicon MaterialsPorous SiliconRaman ScatteringSilicon
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Anisotropic etching of silicon
K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations