Publication | Closed Access
Flux distributions in low pressure deposition and etch models
36
Citations
0
References
1991
Year
Low Pressure DepositionEngineeringPhysicsNumerical SimulationApplied PhysicsTransport PhenomenaMultiphase FlowChemical DepositionPlasma EtchingChemical Vapor Deposition
No additional data available for this publication yet. Check back later!