Mechanical and optical properties of hard SiCN coatings prepared by PECVD - Concepedia

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Mechanical and optical properties of hard SiCN coatings prepared by PECVD

156

Citations

39

References

2003

Year

P. Jedrzejowski, Aram Amassian, J.E. Klemberg-Sapieha, J. Vlček, L. Martinů

Thin Solid Films

Materials EngineeringMaterials ScienceEngineeringOptical PropertiesMechanical EngineeringHard Sicn CoatingsSurface ProcessingDepth-graded Multilayer CoatingCarbideProtective Coating

References

	Year	Citations

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