Concepedia

Publication | Closed Access

Fabrication of SiCN MEMS by photopolymerization of pre-ceramic polymer

DOI

194

Citations

5

References

2002

Year

Li‐Anne Liew, Yiping Liu, Ruiling Luo, Tsali Cross, Linan An, Victor M. Bright, Martin L. Dunn, John W. Daily, Rishi Raj
Sensors and Actuators A Physical

References

YearCitations

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